Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
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| Materyal Türü: | Kitap |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
Boca Raton, Fla.
CRC Press
c2005.
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| Edisyon: | 2nd ed. |
| Seri Bilgileri: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Konular: |