Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| Prif Awdur: | |
|---|---|
| Fformat: | Llyfr |
| Iaith: | English |
| Cyhoeddwyd: |
Boca Raton, Fla.
CRC Press
c2005.
|
| Rhifyn: | 2nd ed. |
| Cyfres: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Pynciau: |