Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| Үндсэн зохиолч: | |
|---|---|
| Формат: | Ном |
| Хэл сонгох: | англи |
| Хэвлэсэн: |
Boca Raton, Fla.
CRC Press
c2005.
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| Хэвлэл: | 2nd ed. |
| Цуврал: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Нөхцлүүд: |