Introduction to microelectronic fabrication

Bibliographische Detailangaben
1. Verfasser:	Jaeger, Richard C.
Format:	Buch
Sprache:	English
Veröffentlicht:	Upper Saddle River, N.J. Prentice Hall c2002.
Ausgabe:	2nd ed.
Schriftenreihe:	Modular series on solid state devices v. 5
Schlagworte:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.