Introduction to microelectronic fabrication

Bibliographic Details
Main Author:	Jaeger, Richard C.
Format:	Book
Language:	English
Published:	Upper Saddle River, N.J. Prentice Hall c2002.
Edition:	2nd ed.
Series:	Modular series on solid state devices v. 5
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.