Introduction to microelectronic fabrication

Bibliografiske detaljer
Hovedforfatter:	Jaeger, Richard C.
Format:	Bog
Sprog:	English
Udgivet:	Upper Saddle River, N.J. Prentice Hall c2002.
Udgivelse:	2nd ed.
Serier:	Modular series on solid state devices v. 5
Fag:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.