Introduction to microelectronic fabrication

Detalles Bibliográficos
Autor Principal:	Jaeger, Richard C.
Formato:	Libro
Idioma:	English
Publicado:	Upper Saddle River, N.J. Prentice Hall c2002.
Edición:	2nd ed.
Series:	Modular series on solid state devices v. 5
Subjects:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.