Introduction to microelectronic fabrication

Bibliografiska uppgifter
Huvudupphovsman:	Jaeger, Richard C.
Materialtyp:	Bok
Språk:	English
Publicerad:	Upper Saddle River, N.J. Prentice Hall c2002.
Upplaga:	2nd ed.
Serie:	Modular series on solid state devices v. 5
Ämnen:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.