Introduction to microelectronic fabrication

Xehetasun bibliografikoak
Egile nagusia:	Jaeger, Richard C.
Formatua:	Liburua
Hizkuntza:	English
Argitaratua:	Upper Saddle River, N.J. Prentice Hall c2002.
Edizioa:	2nd ed.
Saila:	Modular series on solid state devices v. 5
Gaiak:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.