High vacuum thermal oxidation of RF magnetron sputtered aluminum film on copper substrate for TBC-AL203 growth

書目詳細資料
主要作者:	Garcia, Alipio Terrano
格式:	Thesis
語言:	English
出版:	1999.
主題:	Sputtering (Physics). Aluminum films. Copper > Oxidation. Aluminum > Anodic oxidation.