High vacuum thermal oxidation of RF magnetron sputtered aluminum film on copper substrate for TBC-AL203 growth

Bibliografski detalji
Glavni autor:	Garcia, Alipio Terrano
Format:	Disertacija
Jezik:	English
Izdano:	1999.
Teme:	Sputtering (Physics). Aluminum films. Copper > Oxidation. Aluminum > Anodic oxidation.