High vacuum thermal oxidation of RF magnetron sputtered aluminum film on copper substrate for TBC-AL203 growth

ग्रंथसूची विवरण
मुख्य लेखक:	Garcia, Alipio Terrano
स्वरूप:	थीसिस
भाषा:	English
प्रकाशित:	1999.
विषय:	Sputtering (Physics). Aluminum films. Copper > Oxidation. Aluminum > Anodic oxidation.