High vacuum thermal oxidation of RF magnetron sputtered aluminum film on copper substrate for TBC-AL203 growth

Bibliografiske detaljer
Hovedforfatter:	Garcia, Alipio Terrano
Format:	Thesis
Sprog:	English
Udgivet:	1999.
Fag:	Sputtering (Physics). Aluminum films. Copper > Oxidation. Aluminum > Anodic oxidation.