Sheet plasma configurations suitable for materials processing

מידע ביבליוגרפי
Main Authors:	Ramos, Henry J. (Author), Doi, Kenta (Author), Fernandez, Marcedon S. (Author), Malapit, Giovanni M. (Author), Sasao, Mamiko (Author), Villamayor, Michelle Marie S. (Author), Wada, Motoi (Author)
פורמט:	Analytics
שפה:	English
יצא לאור:	2014.
נושאים:	Ion beams. Magnetized sheet plasmas. Negative hydrogen ions. TiN. SiH.