Synthesis of ZrN film via the plasma sputter-type negative ion source
| Foilsithe in: | Science Diliman Vol. 11, no. 2 (1999), 39-43 |
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| Príomhchruthaitheoir: | |
| Rannpháirtithe: | , , , |
| Formáid: | Alt |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
1999
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| Ábhair: |