Synthesis of ZrN film via the plasma sputter-type negative ion source

Bibliographic Details
Published in:	Science Diliman Vol. 11, no. 2 (1999), 39-43
Main Author:	Valmoria, Nico
Other Authors:	Mendenilla, Alexander, Yambot, Miguel, Mena, Manolo, Ramos, Henry
Format:	Article
Language:	English
Published:	1999
Subjects:	Ion sources Plasma physics