Handbook of silicon based MEMS materials and technologies

书目详细资料
其他作者:	Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
格式:	Electronic Resource
语言:	English
出版:	London Elsevier [2020]
版:	Third edition.
主题:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
在线阅读:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy