Handbook of silicon based MEMS materials and technologies

Библиографические подробности
Другие авторы:	Tilli, Markku (Редактор), Paulasto-Krockel, Mervi (Редактор), Petzold, Matthias (Редактор), Theuss, Horst (Редактор), Motooka, Teruaki (Редактор), Lindroos, Veikko (Редактор)
Формат:	Electronic Resource
Язык:	English
Опубликовано:	London Elsevier [2020]
Редактирование:	Third edition.
Предметы:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Online-ссылка:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy