Handbook of silicon based MEMS materials and technologies

Bibliografische gegevens
Andere auteurs:	Tilli, Markku (Redacteur), Paulasto-Krockel, Mervi (Redacteur), Petzold, Matthias (Redacteur), Theuss, Horst (Redacteur), Motooka, Teruaki (Redacteur), Lindroos, Veikko (Redacteur)
Formaat:	Electronic Resource
Taal:	English
Gepubliceerd in:	London Elsevier [2020]
Editie:	Third edition.
Onderwerpen:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Online toegang:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy