Handbook of silicon based MEMS materials and technologies

ग्रंथसूची विवरण
अन्य लेखक:	Tilli, Markku (संपादक), Paulasto-Krockel, Mervi (संपादक), Petzold, Matthias (संपादक), Theuss, Horst (संपादक), Motooka, Teruaki (संपादक), Lindroos, Veikko (संपादक)
स्वरूप:	Electronic Resource
भाषा:	English
प्रकाशित:	London Elsevier [2020]
संस्करण:	Third edition.
विषय:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
ऑनलाइन पहुंच:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy