Handbook of silicon based MEMS materials and technologies

Sonraí bibleagrafaíochta
Rannpháirtithe:	Tilli, Markku (Eagarthóir), Paulasto-Krockel, Mervi (Eagarthóir), Petzold, Matthias (Eagarthóir), Theuss, Horst (Eagarthóir), Motooka, Teruaki (Eagarthóir), Lindroos, Veikko (Eagarthóir)
Formáid:	Electronic Resource
Teanga:	English
Foilsithe / Cruthaithe:	London Elsevier [2020]
Eagrán:	Third edition.
Ábhair:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Rochtain ar líne:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy