Handbook of silicon based MEMS materials and technologies

Xehetasun bibliografikoak
Beste egile batzuk:	Tilli, Markku (Argitaratzailea), Paulasto-Krockel, Mervi (Argitaratzailea), Petzold, Matthias (Argitaratzailea), Theuss, Horst (Argitaratzailea), Motooka, Teruaki (Argitaratzailea), Lindroos, Veikko (Argitaratzailea)
Formatua:	Electronic Resource
Hizkuntza:	English
Argitaratua:	London Elsevier [2020]
Edizioa:	Third edition.
Gaiak:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Sarrera elektronikoa:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy