Handbook of silicon based MEMS materials and technologies

Detalles Bibliográficos
Otros Autores:	Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
Formato:	Electronic Resource
Lenguaje:	English
Publicado:	London Elsevier [2020]
Edición:	Third edition.
Materias:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Acceso en línea:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy