Handbook of silicon based MEMS materials and technologies

Bibliografiske detaljer
Andre forfattere:	Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
Format:	Electronic Resource
Sprog:	English
Udgivet:	London Elsevier [2020]
Udgivelse:	Third edition.
Fag:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
Online adgang:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy