Handbook of silicon based MEMS materials and technologies

Podrobná bibliografie
Další autoři:	Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
Médium:	Electronic Resource
Jazyk:	English
Vydáno:	London Elsevier [2020]
Vydání:	Third edition.
Témata:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
On-line přístup:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy