Handbook of silicon based MEMS materials and technologies

গ্রন্থ-পঞ্জীর বিবরন
অন্যান্য লেখক:	Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
বিন্যাস:	Electronic Resource
ভাষা:	English
প্রকাশিত:	London Elsevier [2020]
সংস্করন:	Third edition.
বিষয়গুলি:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties. Electronic books.
অনলাইন ব্যবহার করুন:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy