Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

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Bibliografiske detaljer
Andre forfattere: Tilli, Markku (Editor), Paulasto-Krockel, Mervi (Editor), Petzold, Matthias (Editor), Theuss, Horst (Editor), Motooka, Teruaki (Editor), Lindroos, Veikko (Editor)
Format: Electronic Resource
Sprog:English
Udgivet: London Elsevier [2020]
Udgivelse:Third edition.
Fag:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Electronic books.
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