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Dyfyniad Arddull ChicagoTilli, Markku, Mervi Paulasto-Krockel, Matthias Petzold, Horst Theuss, Teruaki Motooka, and Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. Third edition. London: Elsevier, 2020.
Dyfyniad MLATilli, Markku, et al. Handbook of Silicon Based MEMS Materials and Technologies. Third edition. Elsevier, 2020.
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