An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications
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| Formaat: | Electronic Resource |
| Taal: | English |
| Gepubliceerd in: |
Ann Arbor Michigan
ProQuest Information and Learning Company
[2006]
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| Onderwerpen: | |
| Online toegang: | Full text access requires UP Webmail login |