An investigation into the supercritical CO₂/Co-solvent extraction of porogen and surfactant templates from organosilicate thin films for low-k applications
| Auteur principal: | |
|---|---|
| Format: | Electronic Resource |
| Langue: | English |
| Publié: |
Ann Arbor Michigan
ProQuest Information and Learning Company
[2006]
|
| Sujets: | |
| Accès en ligne: | Full text access requires UP Webmail login |