Developments in surface contamination and cleaning cleaning techniques

Developments in surface contamination and cleaning cleaning techniques

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...

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Dades bibliogràfiques
Altres autors: Kohli, Rajiv (Editor), Mittal, K.L (Editor)
Format: Electronic Resource
Idioma:English
Publicat: Oxford William Andrew [2015]
Matèries:
Surfaces (Technology).
Surface contamination > Prevention.
Particles > Measurement.
Cleaning.
Coatings.
Electronic books.
Accés en línia:Available for University of the Philippines System via ScienceDirect. Click here to access
Available for University of the Philippines System via ScienceDirect. Click here to access remotely thru EZproxy