Developments in surface contamination and cleaning cleaning techniques
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...
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Resource Type: | Electronic Resource |
Language: | English |
Published: |
Oxford
William Andrew
[2015]
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Online Access: | Available for University of the Philippines System via ScienceDirect. Click here to access Available for University of the Philippines System via ScienceDirect. Click here to access remotely thru EZproxy |
Internet
Available for University of the Philippines System via ScienceDirect. Click here to accessAvailable for University of the Philippines System via ScienceDirect. Click here to access remotely thru EZproxy
College of Engineering Library II (UP Diliman)
Accession # | Call # | Volume/Part# | Copy # | Collection | Circulation Type | Circulation Status |
---|---|---|---|---|---|---|
UPDE-6596EB | TA 418.7 / D48 2015EB | Non-Circulation | Not Applicable |