Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

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Detalles Bibliográficos
Outros autores: Glendinning, William B. (Editor), Helbert, John N. (Editor)
Formato: Electronic Resource
Idioma:English
Publicado: Park Ridge, N.J. William Andrew [1991]
Subjects:
Integrated circuits > Very large scale integration.
Microlithography.
Electronic books.
Acceso en liña:Available for University of the Philippines System via ScienceDirect. Click here to access
Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy