APA (7th ed.) Citation

Glendinning, W. B., & Helbert, J. N. (1991). Handbook of VLSI microlithography: Principles, technology, and applications. William Andrew. https://doi.org/10.1016/C2009-0-20447-8

Chicago Style (17th ed.) Citation

Glendinning, William B., and John N. Helbert. Handbook of VLSI Microlithography: Principles, Technology, and Applications. Park Ridge, N.J: William Andrew, 1991. https://doi.org/10.1016/C2009-0-20447-8.

MLA (9th ed.) Citation

Glendinning, William B., and John N. Helbert. Handbook of VLSI Microlithography: Principles, Technology, and Applications. William Andrew, 1991. https://doi.org/10.1016/C2009-0-20447-8.