Detection and classification of defect patterns on semiconductor wafers

Detection and classification of defect patterns on semiconductor wafers

Bibliografske podrobnosti
izdano v:IIE Transactions : Quality and Reliability Engineering 38, 12 (2006 (D)).
Glavni avtor: Chih-Hsuan Wang
Drugi avtorji: Way Kuo, Halima Bensmail
Format: Article
Jezik:English
Teme:
Defect recognition.
Process engineering.