Abat, J. R. R., & Somintac, A. S. (2013). Aluminum nitride/ air-gap structures fabricated via selective wet chemical etching. National Institute of Physics, College of Science, University of the Philippines Diliman.
Цитирование в стиле Чикаго (17-е изд.)Abat, Jonathan Ray R., и Armand S. Somintac. Aluminum Nitride/ Air-gap Structures Fabricated via Selective Wet Chemical Etching. Quezon City: National Institute of Physics, College of Science, University of the Philippines Diliman, 2013.
Цитирование MLA (9-е изд.)Abat, Jonathan Ray R., и Armand S. Somintac. Aluminum Nitride/ Air-gap Structures Fabricated via Selective Wet Chemical Etching. National Institute of Physics, College of Science, University of the Philippines Diliman, 2013.
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