Abat, J. R. R., & Somintac, A. S. (2013). Aluminum nitride/ air-gap structures fabricated via selective wet chemical etching. National Institute of Physics, College of Science, University of the Philippines Diliman.
Chicago Style (17th ed.) CitationAbat, Jonathan Ray R., and Armand S. Somintac. Aluminum Nitride/ Air-gap Structures Fabricated via Selective Wet Chemical Etching. Quezon City: National Institute of Physics, College of Science, University of the Philippines Diliman, 2013.
MLA (9th ed.) CitationAbat, Jonathan Ray R., and Armand S. Somintac. Aluminum Nitride/ Air-gap Structures Fabricated via Selective Wet Chemical Etching. National Institute of Physics, College of Science, University of the Philippines Diliman, 2013.
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