Planar magnetron plasma devices and applications

Bibliografiske detaljer
Hovedforfatter: Villamayor, Michelle Marie S. (Author)
Andre forfattere: Ramos, Henry J. (adviser.), Wada, Motoi (co-adviser.)
Format: Thesis
Sprog:engelsk
Udgivet: Quezon City National Institute of Physics, College of Science, University of the Philippines Diliman 2014.
Fag: