Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

Analysis of LPC data for wafer yield improvement using a combined data mining and visualization technique

書目詳細資料
發表在:Industrial engineering & management systems 2, 2 (2003 (D)).
主要作者: Tien-Lung Sun
其他作者: Chih-Cheng Tsai
格式: Article
語言:English
主題:
IC manufacturing.
Data mining tree.
Data visualization.
Parallel coordinates.
Decision tree.