Introduction to microsystem design

Bibliographische Detailangaben
1. Verfasser:	Schomburg, Werner Karl 1955- (VerfasserIn)
Körperschaft:	SpringerLink (Online service)
Format:	Electronic Resource
Sprache:	English
Veröffentlicht:	Berlin, Heidelberg Springer Berlin Heidelberg [2015]
Ausgabe:	Second edition.
Schlagworte:	Microelectromechanical systems > Design and construction. Electronic books.
Online Zugang:	Available for University of the Philippines System via SpringerLink. Click here to access Also available remotely for University of the Philippines System via SpringerLink. Click here to access thru EZproxy