Silicon wafer bonding technology for VLSI and MEMS applications
| Συγγραφή απο Οργανισμό/Αρχή: | |
|---|---|
| Άλλοι συγγραφείς: | , |
| Μορφή: | Electronic Resource |
| Γλώσσα: | English |
| Έκδοση: |
London, United Kingdom
Institution of Engineering and Technology
2002.
|
| Θέματα: | |
| Διαθέσιμο Online: | Available for University of the Philippines Diliman via IET Digital Library. Click here to access Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy |