Silicon wafer bonding technology for VLSI and MEMS applications

Silicon wafer bonding technology for VLSI and MEMS applications

ग्रंथसूची विवरण
निगमित लेखक: INSPEC. EMIS Group
अन्य लेखक: Iyer, Subramanian S. (संपादक), Auberton-Herve, Andre J. (संपादक)
स्वरूप: Electronic Resource
भाषा:English
प्रकाशित: London, United Kingdom Institution of Engineering and Technology 2002.
विषय:
Silicon-on-insulator technology.
Integrated circuits > Very large scale integration.
Microelectromechanical systems.
Electronic books.
ऑनलाइन पहुंच:Available for University of the Philippines Diliman via IET Digital Library. Click here to access
Also available remotely for University of the Philippines Diliman via IET Digital Library. Click here to access thru EZproxy