Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

书目详细资料
发表在:Surface Engineering Bulletin 4, 1-4 (2012).
主要作者: Valleti, Krishna
格式: 文件
语言:English
主题:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.