Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Reactive metal ion etching a tool for reduction of mirco-droplets in cathodic arc pvd process

Podrobná bibliografie
Vydáno v:Surface Engineering Bulletin 4, 1-4 (2012).
Hlavní autor: Valleti, Krishna
Médium: Článek
Jazyk:English
Témata:
Physical vapour deposition (PVD).
Reactive metal.
Ion etching.