RF MEMS theory, design, and technology

Bibliográfalaš dieđut
Váldodahkki:	Rebeiz, Gabriel M. (Dahkki)
Materiálatiipa:	Girji
Giella:	eaŋgalasgiella
Almmustuhtton:	Hoboken, New Jersery John Wiley & Sons, Inc. [2003]
Fáttát:	Microelectromechanical systems. Very high speed integrated circuits.
Liŋkkat:	Table of contents