Journal of vacuum science & technology. B, Microelectronics and nanometer structures.

Chi tiết về thư mục
Định dạng:	Continuing Resource
Ngôn ngữ:	English
Được phát hành:	New York Published for the Society by the American Institute of Physics c1991-
Những chủ đề:	Vacuum technology > Periodicals. Microelectronics > Periodicals. Nanoparticles > Measurement > Periodicals.