Journal of vacuum science & technology. B, Microelectronics and nanometer structures.

Bibliographische Detailangaben
Format:	Continuing Resource
Sprache:	English
Veröffentlicht:	New York Published for the Society by the American Institute of Physics c1991-
Schlagworte:	Vacuum technology > Periodicals. Microelectronics > Periodicals. Nanoparticles > Measurement > Periodicals.