Microelectronic test structures for CMOS technology

Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Detalhes bibliográficos
Autor principal: Bhushan, Manjul
Autor Corporativo: SpringerLink (Online service)
Outros Autores: Ketchen, Mark B.
Formato: Electronic Resource
Idioma:English
Publicado em: New York Springer c2011.
Assuntos:
Metal oxide semiconductors, Complementary > Testing.
Electronic books.
Acesso em linha:Available for University of the Philippines Diliman via SpringerLink. Click here to access