Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

पूर्ण विवरण

ग्रंथसूची विवरण
मुख्य लेखक: Bhushan, Manjul
निगमित लेखक: SpringerLink (Online service)
अन्य लेखक: Ketchen, Mark B.
स्वरूप: Electronic Resource
भाषा:English
प्रकाशित: New York Springer c2011.
विषय:
ऑनलाइन पहुंच:Available for University of the Philippines Diliman via SpringerLink. Click here to access