Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

Szczegółowa specyfikacja

Opis bibliograficzny

1. autor:	Bhushan, Manjul
Korporacja:	SpringerLink (Online service)
Kolejni autorzy:	Ketchen, Mark B.
Format:	Electronic Resource
Język:	English
Wydane:	New York Springer c2011.
Hasła przedmiotowe:	Metal oxide semiconductors, Complementary > Testing. Electronic books.
Dostęp online:	Available for University of the Philippines Diliman via SpringerLink. Click here to access