Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

Szczegółowa specyfikacja

Opis bibliograficzny
1. autor: Bhushan, Manjul
Korporacja: SpringerLink (Online service)
Kolejni autorzy: Ketchen, Mark B.
Format: Electronic Resource
Język:English
Wydane: New York Springer c2011.
Hasła przedmiotowe:
Dostęp online:Available for University of the Philippines Diliman via SpringerLink. Click here to access