Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

Descrizione completa

Dettagli Bibliografici
Autore principale: Bhushan, Manjul
Ente Autore: SpringerLink (Online service)
Altri autori: Ketchen, Mark B.
Natura: Electronic Resource
Lingua:English
Pubblicazione: New York Springer c2011.
Soggetti:
Accesso online:Available for University of the Philippines Diliman via SpringerLink. Click here to access