MEMS reliability

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

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Détails bibliographiques
Auteur principal: Hartzell, Allyson L.
Collectivité auteur: SpringerLink (Online service)
Autres auteurs: Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D. 1940-
Format: Electronic Resource
Langue:anglais
Publié: New York Springer 2011.
Collection:MEMS reference shelf
Sujets:
Accès en ligne:Available for University of the Philippines Diliman via SpringerLink. Click here to access