MEMS reliability

Successfully bringing MEMS-based products to market hinges on engineering the component to have sufficient reliability for the intended application, yet the reliability and qualification methodology for MEMS based products is not widely understood. Companies that have a deep understanding of MEMS re...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Hartzell, Allyson L.
Körperschaft:	SpringerLink (Online service)
Weitere Verfasser:	Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D. 1940-
Format:	Electronic Resource
Sprache:	English
Veröffentlicht:	New York Springer 2011.
Schriftenreihe:	MEMS reference shelf
Schlagworte:	Microelectromechanical systems > Reliability. Electronic books.
Online Zugang:	Available for University of the Philippines Diliman via SpringerLink. Click here to access