Introduction to microsystem design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
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| Format: | Electronic Resource |
| Idioma: | English |
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Berlin, Heidelberg
Springer
2011.
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| Accés en línia: | Available for University of the Philippines Diliman via SpringerLink. Click here to access |